Daily Papers

How can we distinguish whether a peer review was written by a human or generated by an AI model? We argue that, in this setting, authorship should not be attributed solely from the textual features of a review, but also from the ideas, judgments, and claims it expresses. To this end, we propose Sem-Detect, an authorship detection method for peer reviews that operationalizes this principle by combining textual features with claim-level semantic analysis. Sem-Detect compares a target review against multiple AI-generated reviews of the same paper, leveraging the observation that different AI models tend to converge on similar points, while human reviewers introduce more unique and diverse ones. As a result, Sem-Detect is able to distinguish fully AI reviews from authentic human-written ones, including those that have been refined using an LLM but still reflect human judgment. Across a dataset of over 20,000 peer reviews from ICLR and NeurIPS conferences, Sem-Detect improves over the strongest baseline by 25.5% in [email protected]% FPR in the binary setting. Moreover, in the three-class scenario, we empirically show that LLM refinement preserves the semantic signals of human reviews, which remain distinct from the patterns exhibited by fully AI-generated text; as a result, fewer than 3.5% of LLM-refined human reviews are misclassified as AI-generated.

In the field of integrated circuit manufacturing, the detection and classification of nanoscale wafer defects are critical for subsequent root cause analysis and yield enhancement. The complex background patterns observed in scanning electron microscope (SEM) images and the diverse textures of the defects pose significant challenges. Traditional methods usually suffer from insufficient data, labels, and poor transferability. In this paper, we propose a novel few-shot learning approach, SEM-CLIP, for accurate defect classification and segmentation. SEM-CLIP customizes the Contrastive Language-Image Pretraining (CLIP) model to better focus on defect areas and minimize background distractions, thereby enhancing segmentation accuracy. We employ text prompts enriched with domain knowledge as prior information to assist in precise analysis. Additionally, our approach incorporates feature engineering with textual guidance to categorize defects more effectively. SEM-CLIP requires little annotated data, substantially reducing labor demands in the semiconductor industry. Extensive experimental validation demonstrates that our model achieves impressive classification and segmentation results under few-shot learning scenarios.

Anomaly Detection (AD) focuses on detecting samples that differ from the standard pattern, making it a vital tool in process control. Logical anomalies may appear visually normal yet violate predefined constraints on object presence, arrangement, or quantity, depending on reasoning and explainability. We introduce LogicQA, a framework that enhances AD by providing industrial operators with explanations for logical anomalies. LogicQA compiles automatically generated questions into a checklist and collects responses to identify violations of logical constraints. LogicQA is training-free, annotation-free, and operates in a few-shot setting. We achieve state-of-the-art (SOTA) Logical AD performance on public benchmarks, MVTec LOCO AD, with an AUROC of 87.6 percent and an F1-max of 87.0 percent along with the explanations of anomalies. Also, our approach has shown outstanding performance on semiconductor SEM corporate data, further validating its effectiveness in industrial applications.

Table structure recognition is an indispensable element for enabling machines to comprehend tables. Its primary purpose is to identify the internal structure of a table. Nevertheless, due to the complexity and diversity of their structure and style, it is highly challenging to parse the tabular data into a structured format that machines can comprehend. In this work, we adhere to the principle of the split-and-merge based methods and propose an accurate table structure recognizer, termed SEMv2 (SEM: Split, Embed and Merge). Unlike the previous works in the ``split'' stage, we aim to address the table separation line instance-level discrimination problem and introduce a table separation line detection strategy based on conditional convolution. Specifically, we design the ``split'' in a top-down manner that detects the table separation line instance first and then dynamically predicts the table separation line mask for each instance. The final table separation line shape can be accurately obtained by processing the table separation line mask in a row-wise/column-wise manner. To comprehensively evaluate the SEMv2, we also present a more challenging dataset for table structure recognition, dubbed iFLYTAB, which encompasses multiple style tables in various scenarios such as photos, scanned documents, etc. Extensive experiments on publicly available datasets (e.g. SciTSR, PubTabNet and iFLYTAB) demonstrate the efficacy of our proposed approach. The code and iFLYTAB dataset are available at https://github.com/ZZR8066/SEMv2.

Anomaly Detection (AD) in images is a fundamental computer vision problem and refers to identifying images and image substructures that deviate significantly from the norm. Popular AD algorithms commonly try to learn a model of normality from scratch using task specific datasets, but are limited to semi-supervised approaches employing mostly normal data due to the inaccessibility of anomalies on a large scale combined with the ambiguous nature of anomaly appearance. We follow an alternative approach and demonstrate that deep feature representations learned by discriminative models on large natural image datasets are well suited to describe normality and detect even subtle anomalies in a transfer learning setting. Our model of normality is established by fitting a multivariate Gaussian (MVG) to deep feature representations of classification networks trained on ImageNet using normal data only. By subsequently applying the Mahalanobis distance as the anomaly score we outperform the current state of the art on the public MVTec AD dataset, achieving an AUROC value of 95.8 pm 1.2 (mean pm SEM) over all 15 classes. We further investigate why the learned representations are discriminative to the AD task using Principal Component Analysis. We find that the principal components containing little variance in normal data are the ones crucial for discriminating between normal and anomalous instances. This gives a possible explanation to the often sub-par performance of AD approaches trained from scratch using normal data only. By selectively fitting a MVG to these most relevant components only, we are able to further reduce model complexity while retaining AD performance. We also investigate setting the working point by selecting acceptable False Positive Rate thresholds based on the MVG assumption. Code available at https://github.com/ORippler/gaussian-ad-mvtec

Precision in identifying nanometer-scale device-killer defects is crucial in both semiconductor research and development as well as in production processes. The effectiveness of existing ML-based approaches in this context is largely limited by the scarcity of data, as the production of real semiconductor wafer data for training these models involves high financial and time costs. Moreover, the existing simulation methods fall short of replicating images with identical noise characteristics, surface roughness and stochastic variations at advanced nodes. We propose a method for generating synthetic semiconductor SEM images using a diffusion model within a limited data regime. In contrast to images generated through conventional simulation methods, SEM images generated through our proposed DL method closely resemble real SEM images, replicating their noise characteristics and surface roughness adaptively. Our main contributions, which are validated on three different real semiconductor datasets, are: i) proposing a patch-based generative framework utilizing DDPM to create SEM images with intended defect classes, addressing challenges related to class-imbalance and data insufficiency, ii) demonstrating generated synthetic images closely resemble real SEM images acquired from the tool, preserving all imaging conditions and metrology characteristics without any metadata supervision, iii) demonstrating a defect detector trained on generated defect dataset, either independently or combined with a limited real dataset, can achieve similar or improved performance on real wafer SEM images during validation/testing compared to exclusive training on a real defect dataset, iv) demonstrating the ability of the proposed approach to transfer defect types, critical dimensions, and imaging conditions from one specified CD/Pitch and metrology specifications to another, thereby highlighting its versatility.

A key challenge in social network analysis is understanding the position, or stance, of people in the graph on a large set of topics. While past work has modeled (dis)agreement in social networks using signed graphs, these approaches have not modeled agreement patterns across a range of correlated topics. For instance, disagreement on one topic may make disagreement(or agreement) more likely for related topics. We propose the Stance Embeddings Model(SEM), which jointly learns embeddings for each user and topic in signed social graphs with distinct edge types for each topic. By jointly learning user and topic embeddings, SEM is able to perform cold-start topic stance detection, predicting the stance of a user on topics for which we have not observed their engagement. We demonstrate the effectiveness of SEM using two large-scale Twitter signed graph datasets we open-source. One dataset, TwitterSG, labels (dis)agreements using engagements between users via tweets to derive topic-informed, signed edges. The other, BirdwatchSG, leverages community reports on misinformation and misleading content. On TwitterSG and BirdwatchSG, SEM shows a 39% and 26% error reduction respectively against strong baselines.

Austenitic 347H stainless steel offers superior mechanical properties and corrosion resistance required for extreme operating conditions such as high temperature. The change in microstructure due to composition and process variations is expected to impact material properties. Identifying microstructural features such as grain boundaries thus becomes an important task in the process-microstructure-properties loop. Applying convolutional neural network (CNN) based deep-learning models is a powerful technique to detect features from material micrographs in an automated manner. Manual labeling of the images for the segmentation task poses a major bottleneck for generating training data and labels in a reliable and reproducible way within a reasonable timeframe. In this study, we attempt to overcome such limitations by utilizing multi-modal microscopy to generate labels directly instead of manual labeling. We combine scanning electron microscopy (SEM) images of 347H stainless steel as training data and electron backscatter diffraction (EBSD) micrographs as pixel-wise labels for grain boundary detection as a semantic segmentation task. We demonstrate that despite producing instrumentation drift during data collection between two modes of microscopy, this method performs comparably to similar segmentation tasks that used manual labeling. Additionally, we find that naïve pixel-wise segmentation results in small gaps and missing boundaries in the predicted grain boundary map. By incorporating topological information during model training, the connectivity of the grain boundary network and segmentation performance is improved. Finally, our approach is validated by accurate computation on downstream tasks of predicting the underlying grain morphology distributions which are the ultimate quantities of interest for microstructural characterization.

Shrinking pattern dimensions leads to an increased variety of defect types in semiconductor devices. This has spurred innovation in patterning approaches such as Directed self-assembly (DSA) for which no traditional, automatic defect inspection software exists. Machine Learning-based SEM image analysis has become an increasingly popular research topic for defect inspection with supervised ML models often showing the best performance. However, little research has been done on obtaining a dataset with high-quality labels for these supervised models. In this work, we propose a method for obtaining coherent and complete labels for a dataset of hexagonal contact hole DSA patterns while requiring minimal quality control effort from a DSA expert. We show that YOLOv8, a state-of-the-art neural network, achieves defect detection precisions of more than 0.9 mAP on our final dataset which best reflects DSA expert defect labeling expectations. We discuss the strengths and limitations of our proposed labeling approach and suggest directions for future work in data-centric ML-based defect inspection.

Carbon nanotubes (CNTs) are critical building blocks in nanotechnology, yet the characterization of their dynamic growth is limited by the experimental challenges in nanoscale motion measurement using scanning electron microscopy (SEM) imaging. Existing ex situ methods offer only static analysis, while in situ techniques often require manual initialization and lack continuous per-particle trajectory decomposition. We present Visual Feature Tracking (VFTrack) an in-situ real-time particle tracking framework that automatically detects and tracks individual CNT particles in SEM image sequences. VFTrack integrates handcrafted or deep feature detectors and matchers within a particle tracking framework to enable kinematic analysis of CNT micropillar growth. A systematic using 13,540 manually annotated trajectories identifies the ALIKED detector with LightGlue matcher as an optimal combination (F1-score of 0.78, alpha-score of 0.89). VFTrack motion vectors decomposed into axial growth, lateral drift, and oscillations, facilitate the calculation of heterogeneous regional growth rates and the reconstruction of evolving CNT pillar morphologies. This work enables advancement in automated nano-material characterization, bridging the gap between physics-based models and experimental observation to enable real-time optimization of CNT synthesis.